- 홈
- 홍보센터
- 주성 Milestone
- 기술
주성 Milestone
world’s first
Technology
Semiconductor
History
-
1947
Transistor
(Bell Lab) -
1968
DRAM
(IBM Watson) -
1971
LOGIC / CPU
(INTEL)
- Single Tube Vertical LPCVD
1993
- Selective HSG / Capacitor
- Warm Wall Type MOCVD/Cap.
1995
- High-k MO-CVD Cap.
- High-k ALD Cap.
- Parallel Resonance Antenna ICP HDP
1997
- Transistor Channel:Selective Epi
- Parallel Resonance Antenna ICP Etcher
- III-V MOCVD Development
1998
- PECVD for LCD
1999
- SD (ALD & CVD)
2000
- LSP Tech.
2002
- SDP (ALD & CVD)
2003
- Thin Film & Crystalline Solar Tech.
- TSD Tech.
2005
- HJT Solar Tech.
2006
- TSD (ALD&CVD)
2007
- LSP-HDP
2008
- LSP-Etcher
2011
- ALD-Guidance Series
2014
- Selective ALG Tech.
2018
- ALD Perovskite Solar Tech.
- ALG Ru
- ALG Cu
2020
- 2HGA Perovskite Material
(STO, PZT, BST etc.)
2021
- ALG SiC, Graphene.
2022
- III-V Display
2023
- III-V Solar
2024
- III-V Semi
2025
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